The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
Oct. 25, 2005
Takeshi Ohsato, Wako, JP;
Nobuhiro Sakurai, Wako, JP;
Yusuke Hirabayashi, Wako, JP;
Hiroshi Yokobayashi, Wako, JP;
Takeshi Ohsato, Wako, JP;
Nobuhiro Sakurai, Wako, JP;
Yusuke Hirabayashi, Wako, JP;
Hiroshi Yokobayashi, Wako, JP;
Honda Motor Co., Ltd., Tokyo, JP;
Abstract
A multi-axis sensor chip provided by the invention includes a semiconductor substrate having an action part having an external force action area part and non-deforming area parts, a support part supporting the action part, and connecting parts connecting the action part to the support part. The sensor chip also has strain resistance devices provided on deforming parts of the connecting parts and has temperature-compensating resistance devices provided on the non-deforming area parts. Temperature compensation is carried out exactly by means of the temperature-compensating resistance devices when an external force or a load acts on the action part, and highly accurate stress detection can be carried out.