The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Mar. 11, 2005
Shunsuke Kurata, Kamiina-gun, JP;
Shunsuke Kurata, Kamiina-gun, JP;
Olympus Corporation, Tokyo, JP;
Abstract
An inspecting apparatus for inspecting a substrate includes an objective lens attaching part equipped with a plurality of objective lenses each having a different working distance (WD), an objective lens exchanging device which exchanges the objective lens, and a loading stage which is opposed to the objective lens and on which the substrate S is loaded. An objective lens detecting device detects the WD of the objective lens. Displacing devices relatively displace the objective lens and the loading stage in the direction of the optical axis of an inspecting light path and a direction rectangular to the optical axis. And a displacement controlling device controls the relative displacement of the objective lens and the loading stage in the direction rectangular to the optical axis when the lens detecting device detects that the WD of the objective lens is shorter than a predetermined WD.