The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Aug. 24, 2005
Yuichi Shimizu, Hokuto, JP;
Yuichi Shimizu, Hokuto, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A method of manufacturing an electro-optical device, the electro-optical device having a pair of substrates with an electro-optical material interposed therebetween, the method includes forming electrodes on a substrate surface of at least one substrate of the pair of substrates opposite to the electro-optical material so as to apply a predetermined voltage to the electro-optical material for every pixel; forming a base film of an alignment film made of an inorganic material on the electrodes by performing a first PVD method while setting an angle which a scattering direction of the inorganic material forms with respect to the substrate surface to one value or a plurality of values such that the electrode does not generate a blocked portion at one location with respect to the scattering direction; and forming the alignment film made of the inorganic material on the base film by fixing the angle to a predetermined value different from the value set by the first PVD method or performing a second PVD method with a film forming condition different from the first PVD method.