The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Apr. 19, 2006
Applicants:
Shekhar Bhansali, Tampa, FL (US);
Lawrence C. Langebrake, Seminole, FL (US);
Shreyas Bhat, Wilsonville, OR (US);
Inventors:
Shekhar Bhansali, Tampa, FL (US);
Lawrence C. Langebrake, Seminole, FL (US);
Shreyas Bhat, Wilsonville, OR (US);
Assignee:
University of South Florida, Tampa, FL (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 27/02 (2006.01); G01L 9/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
A MEMS-based silicon CTD sensor for ocean environment is presented. The sensor components are a capacitive conductivity sensor, a gold doped silicon temperature sensor, and a multiple diapghram piezoresistive pressure sensor. The sensor elements have further been packaged to protect them from harsh marine environment. The sensor components showed good linear response, resolution and mechanical integrity to the harsh ocean environment.