The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Sep. 11, 2006
Roberto Canegallo, Rimini, IT;
Mauro Mirandola, Riolo Terme, IT;
Alberto Fazzi, Finale Emilia, IT;
Luca Magagni, Bologna, IT;
Roberto Guerrieri, Bologna, IT;
Roberto Canegallo, Rimini, IT;
Mauro Mirandola, Riolo Terme, IT;
Alberto Fazzi, Finale Emilia, IT;
Luca Magagni, Bologna, IT;
Roberto Guerrieri, Bologna, IT;
STMicroelectronics, S.r.l., Agrate Brianza, IT;
Abstract
An embodiment of the present invention relates to a alignment measurement system for measuring alignment between a plurality of chips of a device, the chips being assembled in a three-dimensional stacking configuration and equipped with at least an integrated capacitive sensor, including a multiple-capacitor structure integrated in the capacitive sensor, at least a sensing circuit connected to the multiple-capacitor structure which issues an output voltage, proportional to a variation of a capacitive value of the multiple-capacitor structure of the integrated capacitive sensor of the device and corresponding to a measured misalignment between the chips of the device.