The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Dec. 09, 2004
Heimo Scheucher, Langegg, AT;
Heimo Scheucher, Langegg, AT;
NXP B.V., Eindhoven, NL;
Abstract
In a wafer () with a number of exposure fields (), each of which exposure fields comprises a number of lattice fields () with an IC () located therein, two groups () of saw paths () are provided and two control module fields (A, A, B, B, C, C, D, D) are assigned to each exposure field, each of which control module fields contains at least one optical control module (OCM-A, OCM-A, OCM-B, OCM-B, OCM-C, OCM-C, OCM-D, OCM-D) and lies within the exposure field in question and comprises a plurality of control module field sections (A, A. . . AIN and A, A. . . AN and B, B. . . BN and B, B. . . BN and CN and CN and DN and DN) and is distributed among several lattice grids (), wherein each control module field section (Ato DN) is located in a lattice field and contains at least one control module component ().