The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Sep. 28, 2005
Eugene Mirro, Jr., San Leandro, CA (US);
Benyamin Buller, Cupertino, CA (US);
Thomas D. Lamson, Milpitas, CA (US);
Eugene Mirro, Jr., San Leandro, CA (US);
Benyamin Buller, Cupertino, CA (US);
Thomas D. Lamson, Milpitas, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A beam re-registration system and method for error correction of a particle or other beam are disclosed. The beam re-registration system and method may include a particle or other beam, a stage movable in relation to the particle beam, at least two servos for controlling movement of the stage, a fixed target or grid located on the stage, and a re-registration controller adapted to control the servos. The re-registration controller may attenuate high frequency signals and amplify low frequency signals, and may be a type 2 controller which accurately corrects a ramp disturbance.