The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2008
Filed:
Oct. 02, 2007
Nozomu Hayashi, Tochigi, JP;
Yukihiro Yokota, Tochigi, JP;
Nozomu Hayashi, Tochigi, JP;
Yukihiro Yokota, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A method of measuring a position of a mark in a chamber, a pressure inside the chamber being different from a pressure outside the chamber. The method includes a first detection step of illuminating a reference mark fixedly disposed in the chamber using a first illuminator disposed inside the chamber, and detecting the reference mark using a detector disposed outside the chamber. The method also includes a second detection step of illuminating a mark, which is movable with respect to the reference mark in the chamber, using a second illuminator disposed inside the chamber, and detecting the mark using the detector. The method further includes a calculation step of calculating a position of the mark with respect to the reference mark based on detection results of the first and second detection steps.