The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2008
Filed:
Jan. 05, 2005
Jong-hwa Won, Suwon-si, KR;
Hyung Choi, Seongnam-si, KR;
Kwon-hee Kim, Seoul, KR;
Oh-myoung Kwon, Seoul, KR;
Jong-hwa Won, Suwon-si, KR;
Hyung Choi, Seongnam-si, KR;
Kwon-hee Kim, Seoul, KR;
Oh-myoung Kwon, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A microelectromechanical system (MEMS) sensor and method for measuring the motion of an intermediate member and a method for making the MEMS sensor. The MEMS sensor includes a substrate, a lower magnetic member disposed on the substrate, a layer disposed over the substrate, an upper magnetic member disposed at a side of the layer facing the lower magnetic member, an intermediate magnetic member magnetically levitated between the lower magnetic member and upper magnetic member; and a component measuring at least one of motion, forces acting on, and a displacement of the intermediate magnetic member.