The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2008
Filed:
Jun. 19, 2006
Vladimir A. Aksyuk, Westfield, NJ (US);
Nagesh R. Basavanhally, Skillman, NJ (US);
Omar D. Lopez, Summit, NJ (US);
Chien-shing Pai, Bridgewater, NJ (US);
Vladimir A. Aksyuk, Westfield, NJ (US);
Nagesh R. Basavanhally, Skillman, NJ (US);
Omar D. Lopez, Summit, NJ (US);
Chien-Shing Pai, Bridgewater, NJ (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
The present invention provides a process for manufacturing an apparatus. The process, in one embodiment, includes providing a micro-electro-mechanical system (MEMS) device, the micro-electro-mechanical system (MEMS) device including an actuator coupled to a movable feature, sacrificial material fixing the actuator and movable feature with respect to one another, and a layer of material located over the actuator, movable feature and sacrificial material. The process may further include removing only a portion of the layer of material to expose the sacrificial material, and subjecting the exposed sacrificial material to an etchant to release the movable feature.