The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7451647 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 18, 2008

Filed:

Oct. 09, 2006
Applicants:

Kazuhiro Matsuhisa, Tokyo, JP;

Koji Fukumoto, Kanagawa, JP;

Masaya Nagata, Kanagawa, JP;

Atsuhito Yasui, Kanagawa, JP;

Inventors:

Kazuhiro Matsuhisa, Tokyo, JP;

Koji Fukumoto, Kanagawa, JP;

Masaya Nagata, Kanagawa, JP;

Atsuhito Yasui, Kanagawa, JP;

Assignee:

Sony Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/13 (2006.01);
U.S. Cl.
CPC ...
Abstract

A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.


Find Patent Forward Citations

Matsuhisa, Kazuhiro. (2008). Mems sensor driving device, mems sensor driving method, and active sensor using mems (U.S. Patent No. 7451647). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7451647

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