The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2008
Filed:
Nov. 24, 2004
Hans-georg Lotz, Grundau-Rothenbergen, DE;
Peter Sauer, Schluchtern, DE;
Stefan Hein, Blankenbach, DE;
Peter Skuk, Nidderau, DE;
Hans-Georg Lotz, Grundau-Rothenbergen, DE;
Peter Sauer, Schluchtern, DE;
Stefan Hein, Blankenbach, DE;
Peter Skuk, Nidderau, DE;
Applied Materials GmbH & Co. KG, Alzenau, DE;
Abstract
A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.