The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 2008

Filed:

May. 05, 2005
Applicants:

Eric W. Beach, Tucson, AZ (US);

Jimmy R. Naylor, Tucson, AZ (US);

Walter B. Meinel, Tucson, AZ (US);

Inventors:

Eric W. Beach, Tucson, AZ (US);

Jimmy R. Naylor, Tucson, AZ (US);

Walter B. Meinel, Tucson, AZ (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
Abstract

A thin film resistor structure includes a plurality of thin film resistor sections. Conductive vias () are disposed on a first end of each of the thin film resistor sections, respectively. The first conductor () is connected to the vias of the first end, and a second conductor () is connected to vias on a second end of each of the thin film resistor sections. A distribution of a parameter of a batch of circuits including the thin film resistor structure indicates a systematic error in resistance values. Based on analysis of the distribution and the circuit, or more of the vias are individually moved at the layout grid level by a layout grid address unit to reduce the systematic error by making corresponding adjustments on a via reticle of a mask set used for making the circuits. Expensive laser trimming of thin film resistors of the circuit is thereby avoided.


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