The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2008

Filed:

Sep. 19, 2006
Applicants:

Anupama B. Kaul, Arcadia, CA (US);

Eric W. Wong, Los Angeles, CA (US);

Richard L. Baron, Verdugo City, CA (US);

Larry Epp, Pasadena, CA (US);

Inventors:

Anupama B. Kaul, Arcadia, CA (US);

Eric W. Wong, Los Angeles, CA (US);

Richard L. Baron, Verdugo City, CA (US);

Larry Epp, Pasadena, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/02 (2006.01); H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract

Switches having an in situ grown carbon nanotube as an element thereof, and methods of fabricating such switches. A carbon nanotube is grown in situ in mechanical connection with a conductive substrate, such as a heavily doped silicon wafer or an SOI wafer. The carbon nanotube is electrically connected at one location to a terminal. At another location of the carbon nanotube there is situated a pull electrode that can be used to elecrostatically displace the carbon nanotube so that it selectively makes contact with either the pull electrode or with a contact electrode. Connection to the pull electrode is sufficient to operate the device as a simple switch, while connection to a contact electrode is useful to operate the device in a manner analogous to a relay. In various embodiments, the devices disclosed are useful as at least switches for various signals, multi-state memory, computational devices, and multiplexers.


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