The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2008
Filed:
Jan. 31, 2005
Applicant:
Chang Liu, Champaign, IL (US);
Inventor:
Chang Liu, Champaign, IL (US);
Assignee:
The Board of Trustees of the University of Illinois, Urbana, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); C23C 16/52 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
Abstract
A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.