The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2008
Filed:
Apr. 29, 2004
Applicants:
Mathias Kaempf, Burglengenfeld, DE;
Frank Singer, Regenstauf, DE;
Jurgen Dachs, Reichertshofen, DE;
Alfred Bachler, Zeitlarn, DE;
Inventors:
Mathias Kaempf, Burglengenfeld, DE;
Frank Singer, Regenstauf, DE;
Jurgen Dachs, Reichertshofen, DE;
Alfred Bachler, Zeitlarn, DE;
Assignee:
Osram Opto Semiconductors GmbH, Regensburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65D 85/90 (2006.01); C23F 1/00 (2006.01); B65G 49/05 (2006.01);
U.S. Cl.
CPC ...
Abstract
Cavities for holding semiconductor chips are etched anisotropically into a semiconductor wafer. An orientation of the wafer in the (100) pulling direction results in geometrically exactly etched sidewalls of the cavities with an angle of 125.3°. What is thereby achieved is that chips can slip into the cavity with a low risk of damage. A transparent cover plate is situated on the cavity plate.