The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Jul. 07, 2005
Shuzo Seo, Saitama, JP;
Shuzo Seo, Saitama, JP;
Hoya Corporation, Tokyo, JP;
Abstract
A stage apparatus includes a stationary support plate; a Y-direction movable member supported on, and parallel to, the stationary support plate so as to be relatively movable in a Y-direction, the Y-direction movable member including a Y-direction rod portion and a pair of X-direction rod portions, wherein the Y-direction rod portion extends in the Y-direction, and the pair of X-direction rod portions are joined to the Y-direction rod portion to extend in an X-direction both parallel to the stationary support plate and perpendicular to the Y-direction; and an X-direction movable member supported by the pair of X-direction rod portions to be movable in the X-direction relative to the Y-direction movable member. At least one of the pair of X-direction rod portions is rotatable about an axis of the Y-direction rod portion relative to the Y-direction rod portion.