The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2008

Filed:

Sep. 19, 2006
Applicants:

Shigeo Sakino, Higashimurayama, JP;

Hirohito Ito, Utsunomiya, JP;

Shinji Uchida, Utsunomiya, JP;

Choshoku Sai, Utsunomiya, JP;

Katsumi Asada, Utsunomiya, JP;

Inventors:

Shigeo Sakino, Higashimurayama, JP;

Hirohito Ito, Utsunomiya, JP;

Shinji Uchida, Utsunomiya, JP;

Choshoku Sai, Utsunomiya, JP;

Katsumi Asada, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01); G02B 7/182 (2006.01);
U.S. Cl.
CPC ...
Abstract

At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.


Find Patent Forward Citations

Sakino, Shigeo. (2008). Optical element holding apparatus, exposure apparatus and device manufacturing method (U.S. Patent No. 7443619). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7443619

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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