The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2008

Filed:

Sep. 15, 2005
Applicants:

Mark J. Beck, Los Gatos, CA (US);

Raymond Y. Lillard, Redwood City, CA (US);

Eric G. Liebscher, San Jose, CA (US);

Frank M. Haidinyak, San Jose, CA (US);

Inventors:

Mark J. Beck, Los Gatos, CA (US);

Raymond Y. Lillard, Redwood City, CA (US);

Eric G. Liebscher, San Jose, CA (US);

Frank M. Haidinyak, San Jose, CA (US);

Assignee:

Product Systems Incorporated, Campbell, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01); G01H 3/00 (2006.01); G01N 29/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus and method for characterizing cavitation that occurs in a fluid exposed to acoustic energy. The apparatus comprises a vessel for holding the fluid; an acoustic energy generating means for generating acoustic energy, the acoustic energy generating means being positioned to transmit the acoustic energy into the fluid while the fluid is held in the vessel; and a cavitation detection means for detecting cavitation in the fluid held in the vessel. In a preferred embodiment, the cavitation detection means comprises a light detection means, such as a photomultiplier tube, that detects sonoluminescent emission from the fluid. The method comprises the steps of exposing a volume of process fluid to acoustic energy at a specified power level; measuring the photon output from the fluid over a period of time; and when the photon output deviates from a desired level, initiating a remedial step to bring the photon output back to approximately the desired level.


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