The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Oct. 02, 2006
Chien-hua Chen, Corvallis, OR (US);
Paul Felice Reboa, Corvallis, OR (US);
Charles C. Haluzak, Corvallis, OR (US);
Chien-Hua Chen, Corvallis, OR (US);
Paul Felice Reboa, Corvallis, OR (US);
Charles C. Haluzak, Corvallis, OR (US);
Helwett-Packard Development Company, L.P., Houston, TX (US);
Abstract
A method for preparing a microelectromechanical system (MEMS) device for subsequent processing is disclosed. The method includes establishing an anti-stiction material on exposed surfaces of the MEMS device. The exposed surfaces include at least an interior surface of a chamber and an external surface of the MEMS device. The anti-stiction material is selectively removed from at least a portion of the external surface via a plasma sputtering process under controlled conditions.