The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Nov. 09, 2004
Randall B. Sprague, Carnation, WA (US);
Jun Yan, Cincinnati, OH (US);
Jason B. Tauscher, Sammamish, WA (US);
Wyatt O. Davis, Bothell, WA (US);
John R. Lewis, Bellevue, WA (US);
Dean R. Brown, Lynnwood, WA (US);
Thomas W. Montague, Mercer Island, WA (US);
Chancellor W. Brown, Everett, WA (US);
Randall B. Sprague, Carnation, WA (US);
Jun Yan, Cincinnati, OH (US);
Jason B. Tauscher, Sammamish, WA (US);
Wyatt O. Davis, Bothell, WA (US);
John R. Lewis, Bellevue, WA (US);
Dean R. Brown, Lynnwood, WA (US);
Thomas W. Montague, Mercer Island, WA (US);
Chancellor W. Brown, Everett, WA (US);
Microvision, Inc., Redmond, WA (US);
Abstract
A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.