The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Dec. 30, 2004
Han-choon Lee, Seoul, KR;
Jin-woo Park, Kyungki-do, KR;
Han-Choon Lee, Seoul, KR;
Jin-Woo Park, Kyungki-do, KR;
Dongbu Electronics Co., Ltd., Seoul, KR;
Abstract
A method for forming a plug of a semiconductor device according to a preferred embodiment includes forming a metal wiring on a semiconductor substrate, forming an interlayer dielectric layer on the semiconductor substrate having the metal wiring, forming a contact hole for partially exposing the metal wiring by selectively etching the interlayer dielectric layer, annealing the semiconductor substrate having the contact hole using NHgas, plasma processing the annealed semiconductor substrate using the NH, and forming a barrier layer on the interlayer dielectric layer having the contact hole.