The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Aug. 14, 2006
Applicants:
Yasufumi Aihara, Nagoya, JP;
Hiroto Matsuda, Ogaki, JP;
Inventors:
Yasufumi Aihara, Nagoya, JP;
Hiroto Matsuda, Ogaki, JP;
Assignee:
NGK Insulators, Ltd., Nagoya-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 15/04 (2006.01); B32B 18/00 (2006.01); C04B 35/505 (2006.01); C04B 35/569 (2006.01);
U.S. Cl.
CPC ...
Abstract
A yttria sintered body contains an amount of silicon carbide within a range of 5 to 40% by volume, has a volume resistivity at room temperature within a range of 1×10to 1×10Ω·cm, and is adapted for application to an electrostatic chuck.