The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
May. 07, 2007
Applicants:
Young-sam Lim, Seoul, KR;
Dong-jun Lee, Seoul, KR;
Nam-soo Kim, Suwon, KR;
Sung-taek Moon, Suwon, KR;
Kyoung-moon Kang, Gwangmyeong, KR;
Jae-hyun SO, Sadangu, KR;
Inventors:
Young-Sam Lim, Seoul, KR;
Dong-Jun Lee, Seoul, KR;
Nam-Soo Kim, Suwon, KR;
Sung-Taek Moon, Suwon, KR;
Kyoung-Moon Kang, Gwangmyeong, KR;
Jae-Hyun So, Sadangu, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting using a pseudo window area, where the pseudo window area has a thickness less than a thickness of a polishing layer and a thickness greater than zero.