The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2008

Filed:

May. 20, 2004
Applicants:

Andrew Douglas Bankhead, Leicester, GB;

Ian Mark Lee-bennett, Leicester, GB;

Joseph Armstrong, Dunstable, GB;

Inventors:

Andrew Douglas Bankhead, Leicester, GB;

Ian Mark Lee-Bennett, Leicester, GB;

Joseph Armstrong, Dunstable, GB;

Assignee:

Taylor Hobson Limited, Leicester, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A broad band surface profiling apparatus including a reference calibrator for calibrating the apparatus to compensate for surface features of the reference surface. A user is instructed to conduct calibration measurement operations using a calibration sample having a calibration surface to obtain calibration surface topography data for the calibration sample. At each calibration measurement operation, an image representing the calibration surface topography data is displayed to the user and the user has the option to accept or reject the calibration surface topography data represented by the displayed image. The reference calibrator has a surface topography data processor and a mean surface calculator for calculating mean surface topography data using the processed calibration surface topography data accepted by the user to provide reference surface features data. A reference surface features remover is provided for adjusting surface topography data obtained for a sample surface in accordance with the reference surface features data.


Find Patent Forward Citations

Loading…