The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2008
Filed:
Dec. 01, 2003
Applicants:
Brian H. Moeckly, Menlo Park, CA (US);
Ward S. Ruby, Palm City, FL (US);
Inventors:
Brian H. Moeckly, Menlo Park, CA (US);
Ward S. Ruby, Palm City, FL (US);
Assignee:
Superconductor Technologies, Inc., Santa Barbara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 39/24 (2006.01); C23C 14/34 (2006.01); C23C 14/24 (2006.01); B05D 5/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming MgBfilms in-situ on a substrate includes the steps of (a) depositing boron onto a surface of the substrate in a deposition zone; (b) moving the substrate into a reaction zone containing pressurized, gaseous magnesium; (c) moving the substrate back into the deposition zone; and (d) repeating steps (a)-(c). In a preferred embodiment of the invention, the substrate is moved into and out of the deposition zone and the reaction zone using a rotatable platen.