The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2008
Filed:
Aug. 10, 2007
Isao Yoshida, Ikeda, JP;
Yukako Harada, Settsu, JP;
Takayuki Miyagawa, Toyonaka, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
Abstract
A salt represented by the formula (I): wherein X represents a C1-C12 divalent linear or branched chain hydrocarbon group, Y represents a C1-C30 hydrocarbon group which may be substituted with at least one substituent, and at least one —CH— in the C1-C30 hydrocarbon group may be substituted with —O— or —CO—, Qand Qeach independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and Arepresents an organic counter ion. The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).