The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2008
Filed:
Dec. 11, 2003
Chin-chung Nien, Hsinchu, TW;
Hong Chen Ho, Hsinchu, TW;
Ming-wei Chang, TaiPing, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
The present invention relates to an imprint method for manufacturing micro capacitive ultrasonic transducer, which uses a mold with a particularly patterned surface to imprint into a flexible material thus forming the oscillation cavities of the ultrasonic transducer. Such imprint method not only realizes the volume manufacturing and reduces the cost, but also can precisely control the geometrical size of the oscillation cavities and thus shorten the distance between the upper and the lower electrodes to the micro/nano level, largely improving the sensitivity of the transducer. Moreover, the present invention further changes the procedure for manufacturing micro capacitive ultrasonic transducer of the prior art, which can both save the process steps and overcome the disadvantages in the prior art.