The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2008
Filed:
Oct. 07, 2005
Applicants:
Peter John Holland, Pleasanton, CA (US);
Kate Wilson, Mountain View, CA (US);
Dawn Stephenson, San Jose, CA (US);
Inventors:
Peter John Holland, Pleasanton, CA (US);
Kate Wilson, Mountain View, CA (US);
Dawn Stephenson, San Jose, CA (US);
Assignee:
Edwards Vacuum, Inc., Wilmington, WA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 49/00 (2006.01); F04B 17/00 (2006.01); F04B 35/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.