The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2008

Filed:

Mar. 15, 2006
Applicants:

Nobuyuki Nagasawa, Hino, JP;

Yoshihisa Tanikawa, Tokyo, JP;

Kazuhiko Osa, Hachioji, JP;

Yoshiharu Saito, Hachioji, JP;

Inventors:

Nobuyuki Nagasawa, Hino, JP;

Yoshihisa Tanikawa, Tokyo, JP;

Kazuhiko Osa, Hachioji, JP;

Yoshiharu Saito, Hachioji, JP;

Assignee:

Olympus Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 21/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

It is possible to easily and accurately confirm the position of an optical axis of an objective lens relative to an examination site on a specimen, and positioning of the objective relative to the specimen can be carried out rapidly in a preparation stage. The invention provides scanning examination apparatus comprising a first light source; a light scanning unit configured to scan light from the first light source on a specimen; an objective lens configured to form an image of the light scanned in the light scanning unit at the specimen; a light-detecting unit configured to detect return light emitted from the specimen; a second light source configured to emit visible light; a deflecting optical element, disposed between the light scanning unit and the objective lens, for making visible light emitted from the second light source enter the objective lens along an optical axis of the objective lens; and a beam-shaping unit configured to form the visible light from the second light source, which is irradiated onto a surface of the specimen via the objective lens using the deflecting optical element, into a pattern that enables the optical axis of the objective lens to be indicated.


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