The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2008
Filed:
Nov. 23, 2005
Hironori Utsugi, Hachioji, JP;
Go Ryu, Kawasaki, JP;
Hideki Obuchi, Hachioji, JP;
Olympus Corporation, Tokyo, JP;
Abstract
The present invention has a three-dimensional apparatus including a lattice pattern placed in an optical path and having a slit-like light transmitting portion formed of pitches set at fixed intervals, and a projecting optical system that projects a lattice pattern image formed by the lattice pattern on the sample so that the image is inclined at a predetermined angle. A lattice pitch is determined on the basis of set parameters including the magnification of an observing system. A pattern is formed by the lattice pitch. The pattern is used to pick up a deformed lattice pattern image using a TV camera. An image of each position is acquired while shifting the lattice pattern over several levels. A phase is determined. A height is then determined using the difference between the phase and a basic phase corresponding to a pre-provided magnification or the like. The height is then displayed.