The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2008
Filed:
Jun. 12, 2007
Applicant:
Hideyuki Moribe, Tokyo, JP;
Inventor:
Hideyuki Moribe, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for inspecting a fine pattern with a simple configuration is provided. The apparatus mainly comprises a scanning unit for scanning a surface of the pattern using a light spot, a reflection detecting unit for detecting one of the light beams having been separated from a light beam reflected at the pattern and outputting a first light intensity signal, an astigmatism detecting unit for creating a second light intensity signal including a phase information on the other light beam having been separated, and an image processing unit for creating an inspection result of the pattern based on the first and second light intensity signals.