The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2008
Filed:
Aug. 10, 2004
Yoichi Takahara, Yokohama, JP;
Masahiro Yamada, Yokohama, JP;
Noriyuki Ohroku, Yokohama, JP;
Shoji Asaka, Hanno, JP;
Tomoaki Takahashi, Mobara, JP;
Hiroshi Kawanago, Yokohama, JP;
Hideaki Yamamoto, Tokorozawa, JP;
Yoichi Takahara, Yokohama, JP;
Masahiro Yamada, Yokohama, JP;
Noriyuki Ohroku, Yokohama, JP;
Shoji Asaka, Hanno, JP;
Tomoaki Takahashi, Mobara, JP;
Hiroshi Kawanago, Yokohama, JP;
Hideaki Yamamoto, Tokorozawa, JP;
Hitachi Displays, Ltd., Mobara-Shi, JP;
Abstract
A cleaning apparatus according to the present invention is provided with a brush drive mechanism which brings a brush being rotating closer to a substrate, measures electrical potentials generated on a plurality of conductor patterns formed on the substrate, by a contact and separation with/from tips of scrub materials of the brush being rotating, and controls a positioning of the brush by use of the measurement results. With the process as described above, it is possible to treat uniformly a surface to-be-cleaned for a large-sized substrate, with the cleaning brush. Consequently, it is possible to form a highly qualified transistor for liquid crystal display on the substrate having been cleaned, with enhancing yield.