The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2008

Filed:

Aug. 07, 2002
Applicants:

Stephan Behle, Gau-Odernheim, DE;

Lars Bewig, Bad Gandersheim, DE;

Thomas Küpper, Bad Gandersheim, DE;

Wolfram Maring, Hamburg, DE;

Christoph Mölle, Bad Gandersheim, DE;

Marten Walther, Engelstadt, DE;

Inventors:

Stephan Behle, Gau-Odernheim, DE;

Lars Bewig, Bad Gandersheim, DE;

Thomas Küpper, Bad Gandersheim, DE;

Wolfram Maring, Hamburg, DE;

Christoph Mölle, Bad Gandersheim, DE;

Marten Walther, Engelstadt, DE;

Assignee:

Schott AG, Mainz, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus for coating objects having a single microwave source, two or more coating chambers, and an impedance structure or a waveguide structure. The coating chambers are connected to the single microwave source. The impedance structure or waveguide structure divides the microwave energy in order to generate plasmas in the coating chambers.


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