The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2008
Filed:
Aug. 22, 2007
John Michael Lull, Fullerton, CA (US);
Chiun Wang, Cypress, CA (US);
Joseph A. Saggio, Jr., Anaheim Hills, CA (US);
John Michael Lull, Fullerton, CA (US);
Chiun Wang, Cypress, CA (US);
Joseph A. Saggio, Jr., Anaheim Hills, CA (US);
Celerity, Inc., Austin, TX (US);
Abstract
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.