The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2008
Filed:
May. 27, 2005
Shinji Taniguchi, Kawasaki, JP;
Tokihiro Nishihara, Kawasaki, JP;
Takeshi Sakashita, Kawasaki, JP;
Tsuyoshi Yokoyama, Kawasaki, JP;
Masafumi Iwaki, Kawasaki, JP;
Masanori Ueda, Yokohama, JP;
Tsutomu Miyashita, Yokohama, JP;
Shinji Taniguchi, Kawasaki, JP;
Tokihiro Nishihara, Kawasaki, JP;
Takeshi Sakashita, Kawasaki, JP;
Tsuyoshi Yokoyama, Kawasaki, JP;
Masafumi Iwaki, Kawasaki, JP;
Masanori Ueda, Yokohama, JP;
Tsutomu Miyashita, Yokohama, JP;
Fujitsu Media Devices Limited, Yokohama, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A piezoelectric thin-film resonator includes a device substrate and a laminated body provided on the device substrate and composed of a lower electrode, an upper electrode and a piezoelectric film sandwiched between the lower and upper electrodes. The laminated body has a membrane portion in which the upper and lower electrodes overlap with each other through the piezoelectric film, and a gap has a dome shape being formed between the device substrate and the lower electrode and located below the membrane portion.