The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2008
Filed:
Mar. 17, 2006
Satyendra Kumar, Troy, MI (US);
Devendra Kumar, Rochester Hills, MI (US);
Dominique Tasch, Mietingen, DE;
Raimund Stroebel, Neu-Ulm, DE;
Satyendra Kumar, Troy, MI (US);
Devendra Kumar, Rochester Hills, MI (US);
Dominique Tasch, Mietingen, DE;
Raimund Stroebel, Neu-Ulm, DE;
BTU International, Inc., N. Billerica, MA (US);
Abstract
Methods and apparatus are provided for igniting, modulating, and sustaining a plasma for various plasma processes and treatments. Such treatments include cleaning and sterilizing parts. In some embodiments, a plasma is ignited by subjecting a gas in a multi-mode processing cavity to electromagnetic radiation having a frequency between about 1 MHz and about 333 GHz in the presence of a plasma catalyst. A part can be cleaned by, for example, inserting hydrogen into the plasma and exposing the part to the hydrogen-enriched plasma. A part can be sterilized by heating the part with the plasma.