The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2008
Filed:
Aug. 19, 2002
Applicants:
Markus Schultheis, Fulda, DE;
Christoph Simons, Biebergemünd, DE;
Martin Weigert, Hanau, DE;
Inventors:
Assignee:
W.C. Heraeus GmbH & Co., KG, Hanau, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); B28B 1/00 (2006.01); B22F 1/00 (2006.01); C04B 35/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrically conductive titanium dioxide sputter target with an electrical resistivity of less than 5 Ω-cm, which contains as an additive at least one doping agent or a mixture of doping agents in an amount of less than 5 mole %. The doping agent or agents are selected from the group including indium oxide, zinc oxide, bismuth oxide, aluminum oxide, gallium oxide, antimony oxide, and zirconium oxide. This treatment renders the titanium dioxide sputter target suitable for use in a direct-current sputtering process without any negative effects on the properties of the coating.