The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2008
Filed:
Nov. 16, 2006
Scott G. Adams, Ithaca, NY (US);
Scott A. Miller, Groton, NY (US);
June Shen-epstein, Freeville, NY (US);
Keith Epstein, Freeville, NY (US);
Scott G. Adams, Ithaca, NY (US);
Scott A. Miller, Groton, NY (US);
June Shen-Epstein, Freeville, NY (US);
Keith Epstein, Freeville, NY (US);
Kionix, Inc., Ithaca, NY (US);
Abstract
In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.