The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2008
Filed:
Nov. 06, 2006
Applicant:
Shinya Mochizuki, Utsunomiya, JP;
Inventor:
Shinya Mochizuki, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/62 (2006.01); G03B 27/42 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
Abstract
A reticle cassette includes a bearing portion and a cover, a reticle being disposed on the bearing portion and accommodated in a space between the bearing portion and the cover. The bearing portion includes electrodes for attracting using an electrostatic force and supporting a first surface of the reticle, the first surface having a pattern being formed thereon.
Quick Actions:
Mochizuki, Shinya. (2008). Reticle cassette and exposure apparatus using reticle cassette (U.S. Patent No. 7430037). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7430037
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile