The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2008
Filed:
Jul. 25, 2005
Ernst Keller, Sunnyvale, CA (US);
John M. White, Hayward, CA (US);
Robin L. Tiner, Santa Cruz, CA (US);
Jiri Kucera, Cupertino, CA (US);
Soo Young Choi, Fremont, CA (US);
Beom Soo Park, San Jose, CA (US);
Michael Starr, San Jose, CA (US);
Ernst Keller, Sunnyvale, CA (US);
John M. White, Hayward, CA (US);
Robin L. Tiner, Santa Cruz, CA (US);
Jiri Kucera, Cupertino, CA (US);
Soo Young Choi, Fremont, CA (US);
Beom Soo Park, San Jose, CA (US);
Michael Starr, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gasses through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.