The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2008
Filed:
Mar. 31, 2005
Applicants:
Tatsuya Ohguro, Yokohama, JP;
Tamio Ikehashi, Yokohama, JP;
Mie Matsuo, Kamakura, JP;
Shuichi Sekine, Yokohama, JP;
Inventors:
Tatsuya Ohguro, Yokohama, JP;
Tamio Ikehashi, Yokohama, JP;
Mie Matsuo, Kamakura, JP;
Shuichi Sekine, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device having a surface MEMS element, includes a semiconductor substrate, and an actuator which is arranged above the semiconductor substrate via a space and has a lower electrode, an upper electrode, and a piezoelectric layer sandwiched between the lower electrode and the upper electrode, at least an entire surface of the piezoelectric layer being substantially flat.