The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7427789 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 23, 2008

Filed:

Jun. 11, 2007
Applicant:

Masafumi Muramatsu, Tokyo, JP;

Inventor:

Masafumi Muramatsu, Tokyo, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/062 (2006.01); H01L 31/113 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of manufacturing a solid-state image pickup device comprises a process for forming a plurality of photoelectric conversion elements PD within a semiconductor substrate, a process for forming an interconnection portion, having an interconnection layerin an insulating layer, on the surface side of the semiconductor substrate, a process for forming an adhesive layer, made of a material cured at a temperature lower than a deterioration starting temperature of the interconnection layer, on the surface of the interconnection portion and bonding a supporting substrateto the surface side of the interconnection portion through the adhesive layerby heat treatment at a temperature lower than the deterioration starting temperature of the interconnection layerand a process for decreasing a thickness of the semiconductor substratefrom the back side. A solid-state image pickup device manufacturing method can bond the supporting substrateto the surface side of the interconnection portion through the adhesive layerwithout exerting a thermal influence upon the interconnection layerthat was previously formed on the surface side of the semiconductor substrate


Find Patent Forward Citations

Muramatsu, Masafumi. (2008). Solid state image pickup device and manufacturing method thereof and semiconductor integrated circuit device and manufacturing method thereof (U.S. Patent No. 7427789). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7427789

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