The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2008
Filed:
Mar. 03, 2005
Motohiro Kono, Kyoto, JP;
Yoshiyuki Nakazawa, Kyoto, JP;
Toshikazu Kitajima, Kyoto, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
A memory () of a control unit () stores correction data () indicating a relationship between a decrement in a measurement value of a film thickness by removal of organic contamination adsorbed onto a substrate and an amount of adsorbed organic contamination corresponding to a difference between a true film thickness and the measurement. The difference is caused by organic contamination adsorbed onto the substrate before removal of organic contamination. In a film-thickness measuring apparatus (), a calculating/measuring partobtains a first measurement value of a film thickness on a substrate () using an ellipsometer (), and further obtains a second measurement value which is affected by remaining organic contamination after organic contamination adsorbed onto the substrate () is removed by an organic contamination remover (). A film-thickness calculator () obtains an amount of adsorbed organic contamination before removal of organic contamination based on the first and second measurement values and the correction data (). A thickness of the thin film formed on the substrate () is accurately obtained based on the first measurement value and the amount of adsorbed organic contamination before removal of organic contamination.