The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2008
Filed:
Mar. 26, 2004
Applicants:
Yuko Uchimaru, Tsukuba, JP;
Masami Inoue, Tokyo, JP;
Inventors:
Yuko Uchimaru, Tsukuba, JP;
Masami Inoue, Tokyo, JP;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
B32B 9/04 (2006.01); C08G 77/56 (2006.01);
U.S. Cl.
CPC ...
Abstract
The use of a material possessing a six-member borazine ring consisting of at least boron and nitrogen elements in the form of a low dielectric constant insulating film in a hard mask, a Cu diffusion barrier layer and an etching stopper which are necessary when low dielectric constant interlayer insulating films and Cu wiring in the multilayer interconnection of an LSI allows the parasitic capacity between the multilayer wirings to be suppressed and enables the ULSI to produce a high-speed operation.