The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2008

Filed:

Jun. 15, 2005
Applicants:

Marc S. Weinberg, Needham, MA (US);

Jonathan Bernstein, Medfield, MA (US);

Jeffrey T. Borenstein, Holliston, MA (US);

Richard Elliott, Stoneham, MA (US);

Gregory Kirkos, Seattle, WA (US);

Anthony S. Kourepenis, Acton, MA (US);

Inventors:

Marc S. Weinberg, Needham, MA (US);

Jonathan Bernstein, Medfield, MA (US);

Jeffrey T. Borenstein, Holliston, MA (US);

Richard Elliott, Stoneham, MA (US);

Gregory Kirkos, Seattle, WA (US);

Anthony S. Kourepenis, Acton, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 9/04 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
Abstract

A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.


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