The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2008
Filed:
Jun. 06, 2005
Ping-chun Liu, Zhubei, TW;
Ming-te Hsiung, Zhunan Town, TW;
Ming-hsin Liu, Hsinchu, TW;
Tean-mu Shen, Hsinchu, TW;
Ping-Chun Liu, Zhubei, TW;
Ming-Te Hsiung, Zhunan Town, TW;
Ming-Hsin Liu, Hsinchu, TW;
Tean-Mu Shen, Hsinchu, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
An anode layer particle beam device includes a base, at least an anode placed on top of the base, an insulation layer set between the anode and the base, at least one magnetic pole, made of magnetic and conductive material and can be used as a cathode, an electric discharge channel, positioned between the anode and the magnetic pole, and an insulating material, placed in the electric discharge channel to serve as an insulator between the anode and the magnetic pole. The magnetic pole is positioned on top of the base and on an somewhat elevated outer periphery of the aforementioned anode (with the center of the later also as its center). An orifice is also set on the radiation path of the anode. Accordingly, a process gas stream can be directed into the electric discharge channel and, after being applied with a biased electric field, with the aide of the anode and the magnetic pole device, a particle beam can be generated and radiated out of the channel.