The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2008
Filed:
Nov. 10, 2005
Yaping Hua, Wuxi, CN;
Leyue Jiang, Wuxi, CN;
Yongyao Cai, Acton, MA (US);
Albert Leung, Burnaby, CA;
Yang Zhao, Andover, MA (US);
Yaping Hua, Wuxi, CN;
Leyue Jiang, Wuxi, CN;
Yongyao Cai, Acton, MA (US);
Albert Leung, Burnaby, CA;
Yang Zhao, Andover, MA (US);
Memsic, Inc., N. Andover, MA (US);
Abstract
Single chip 3-axis thermal accelerometer devices include a substrate, at least one cavity etched in the substrate, a fluid disposed in the cavity, a bridge structure suspended over an opening of the cavity, and a plurality of heater elements and temperature sensing elements disposed on the bridge structure. The substrate has a substantially planar surface defined by X and Y coordinate axes, and the bridge structure is suspended over the opening of the cavity in the X-Y plane. In one embodiment, the bridge structure is configured to position at least two of the temperature sensing elements out of the X-Y plane. The heater and temperature sensing elements are disposed on the bridge structure in optimized arrangements for providing reduced temperature coefficients and for producing output voltages having reduced DC offset and drift.