The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2008
Filed:
Dec. 18, 2002
Jin Wang, Austin, TX (US);
Robert J. Chong, Austin, TX (US);
Christopher A. Bode, Austin, TX (US);
Si-zhao J. Qin, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Jin Wang, Austin, TX (US);
Robert J. Chong, Austin, TX (US);
Christopher A. Bode, Austin, TX (US);
Si-Zhao J. Qin, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A method and an apparatus are provided for applying a self-adaptive filter to a drifting process. The method includes processing a workpiece, measuring an output characteristic of the processed workpiece and modifying a previous estimated process state based at least on the measured output characteristic. The method further includes estimating a next process state based at least on the modified previous estimated process state.