The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2008
Filed:
Feb. 15, 2004
Applicants:
David Elata, Haifa, IL;
Ofir Bochobza-degani, Ashkelon, IL;
Yael Nemirovsky, Haifa, IL;
Inventors:
Assignee:
Technion Research & Development Foundation Ltd., Haifa, IL;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A multi-level decoupled micro-actuator device comprising a first level substrate (), a second level frame () stacked on said first level substrate (), a third level frame () stacked on said second level frame ().